Publication:
N10 SADP bulk FinFET depth micro loading improvement with bias pulsing plasma
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2014 since deposited on 2021-10-22
3last month
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Acq. date: 2026-08-05
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Statistics
Views
2014 since deposited on 2021-10-22
3last month
1last week
Acq. date: 2026-08-05
Citations