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Browsing by Author "Jung, Hyung-Suk"

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    Atomic layer deposition process of Hf-based high-k gate dielectric film on Si substrate

    Park, Tae Joo
    ;
    Cho, Moon Ju
    ;
    Jung, Hyung-Suk
    ;
    Hwang, cheol seong
    Book chapter
    2012-08

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