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Browsing by Author "Jung, Insoo"

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    Highly-conformal plasma-enhanced atomic-layer deposition silicon dioxide liner for high aspect-ratio through-silicon via 3D interconnections

    Civale, Yann
    ;
    Redolfi, Augusto  
    ;
    Velenis, Dimitrios  
    ;
    Heylen, Nancy  
    ;
    Beynet, Julien
    ;
    Jung, Insoo
    Proceedings paper
    2012, 4th Electronics System Integration Technologies Conference - ESTC, 17/10/2012

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