Publication:
Highly-conformal plasma-enhanced atomic-layer deposition silicon dioxide liner for high aspect-ratio through-silicon via 3D interconnections
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1955 since deposited on 2021-10-20
5last month
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Acq. date: 2026-09-14
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Statistics
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1955 since deposited on 2021-10-20
5last month
2last week
Acq. date: 2026-09-14
Citations