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Highly-conformal plasma-enhanced atomic-layer deposition silicon dioxide liner for high aspect-ratio through-silicon via 3D interconnections
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1950 since deposited on 2021-10-20
1last month
Acq. date: 2025-12-12
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Metrics
Views
1950 since deposited on 2021-10-20
1last month
Acq. date: 2025-12-12
Citations