Browsing by Author "Köhler, C."
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Publication Optical solutions for contact hole lithography at the 90nm node and beyond
Proceedings paper2002, Semicon Japan: SEMI Technology Symposium, 4/12/2002Publication Towards implantable autonomous systems; A low-power transducer platform powered by a glucose-fuel cell
;Köhler, C. ;Bentler, C. ;Kloke, A.; ;Pop, Valer ;Op het Veld, J.H.G.Kerzenmacher, S.Proceedings paper2011, PowerMEMS, 15/11/2011