Browsing by Author "Kachel, Krzysztof"
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Publication Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Journal article2017, Journal of Photopolymer Science and Technology, (30) 6, p.667-670Publication Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Oral presentation2017, 34th International Conference of Photopolymer Science and Technology