Publication:

Sequential infiltration synthesis for line edge roughness mitigation of EUV resist

Date

2017

Presentation

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Files

36934.pdf 1.91 MB

Author(s)

Baryshnikova, Marina

;

De Simone, Danilo

;

;

Rincon Delgadillo, Paulina

;

Vandenberghe, Geert

;

Kachel, Krzysztof

;

Knaepen, Werner

;

;

De Roest, David

Metrics

1978 since deposited on 2021-10-24

Acq. date: 2025-12-15