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Browsing by Author "Kakeshita, Kan"

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    Publication

    Selective Si Etchant for Gate-All-Around Transistors with Si1-xGex Channel

    Harada, Ken
    ;
    Suzuki, Tatsunobu
    ;
    Asano, Mari
    ;
    Kakeshita, Kan
    ;
    Puttarame Gowda, Pallavi  
    Meeting abstract
    2021, Surface Preparation and Cleaning Conference (SPCC), 2021

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