Publication:
Selective Si Etchant for Gate-All-Around Transistors with Si1-xGex Channel
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1762 since deposited on 2021-12-01
8last month
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Acq. date: 2026-10-08
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Statistics
Views
1762 since deposited on 2021-12-01
8last month
4last week
Acq. date: 2026-10-08
Citations