Browsing by Author "Kalio, Andre"
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Publication 3D-analysis of semiconductor structures by electron tomography
Journal article2007, Microelectronic Engineering, (84) 11, p.2707-2713Publication Automated quantification of dimensions on tomographic reconstructions of semiconductor devices
Proceedings paper2007, Microscopy of Semiconducting Materials XV, 2/04/2007, p.387-390Publication Tomographic analysis of a FINFET structures
Proceedings paper2007, Microscopy of Semiconducting Materials XV, 2/04/2007, p.375-378