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Conference contributions
Tomographic analysis of a FINFET structures
Publication:
Tomographic analysis of a FINFET structures
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Date
2007
Proceedings Paper
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14206.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Richard, Olivier
;
Kalio, Andre
;
Bender, Hugo
;
Sourty, Erwan
Journal
Abstract
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1851
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Acq. date: 2025-12-15
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1851
since deposited on 2021-10-16
1
last month
Acq. date: 2025-12-15
Citations