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Browsing by Author "Kambham, Ajay"

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    Analysis of dopant diffusion and defects in fin structure using an atoministic kinetic Monte Carlo approach

    Noda, Taiji
    ;
    Kambham, Ajay
    ;
    Vrancken, Christa  
    ;
    Thean, Aaron  
    ;
    Horiguchi, Naoto  
    Proceedings paper
    2013, International Electron Devices Meeting - IEDM, 9/12/2013, p.140-143

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