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Analysis of dopant diffusion and defects in fin structure using an atoministic kinetic Monte Carlo approach
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Analysis of dopant diffusion and defects in fin structure using an atoministic kinetic Monte Carlo approach
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Date
2013
Proceedings Paper
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27845.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Noda, Taiji
;
Kambham, Ajay
;
Vrancken, Christa
;
Thean, Aaron
;
Horiguchi, Naoto
;
Vandervorst, Wilfried
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1903
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Acq. date: 2025-12-10
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Views
1903
since deposited on 2021-10-21
2
last month
Acq. date: 2025-12-10
Citations