Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Kaneda, Yukio"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition

    Kaneda, Yukio
    ;
    Nye, Rachel  
    ;
    Marques, Esteban  
    ;
    Armini, Silvia  
    ;
    Delabie, Annelies  
    Journal article
    2023, JOURNAL OF PHYSICAL CHEMISTRY C, (127) 21, p.10303-10314

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings