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Articles
A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition
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A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition
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Date
2023
Journal article
https://doi.org/10.1021/acs.jpcc.3c00965
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kaneda, Yukio
;
Nye, Rachel
;
Marques, Esteban
;
Armini, Silvia
;
Delabie, Annelies
;
van Setten, Michiel
;
Pourtois, Geoffrey
Journal
JOURNAL OF PHYSICAL CHEMISTRY C
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1212
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Acq. date: 2025-12-15
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Views
1212
since deposited on 2023-06-28
1
last month
Acq. date: 2025-12-15
Citations