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A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition

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1216 since deposited on 2023-06-28
4last month
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Acq. date: 2026-01-11

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1216 since deposited on 2023-06-28
4last month
1last week
Acq. date: 2026-01-11

Citations