Publication:

A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition

Date

2023
Journal article
https://doi.org/10.1021/acs.jpcc.3c00965
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dc.contributor.authorKaneda, Yukio
dc.contributor.authorNye, Rachel
dc.contributor.authorMarques, Esteban
dc.contributor.authorArmini, Silvia
dc.contributor.authorDelabie, Annelies
dc.contributor.authorvan Setten, Michiel
dc.contributor.authorPourtois, Geoffrey
dc.contributor.imecauthorNye, Rachel
dc.contributor.imecauthorMarques, Esteban
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorvan Setten, Michiel
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecvan Setten, Michiel::0000-0003-0557-5260
dc.date.accessioned2023-08-02T19:53:47Z
dc.date.available2023-06-28T19:48:19Z
dc.date.available2023-07-26T08:05:09Z
dc.date.available2023-08-02T19:53:47Z
dc.date.issued2023
dc.identifier.doi10.1021/acs.jpcc.3c00965
dc.identifier.issn1932-7447
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42104
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage10303
dc.source.endpage10314
dc.source.issue21
dc.source.journalJOURNAL OF PHYSICAL CHEMISTRY C
dc.source.numberofpages12
dc.source.volume127
dc.subject.disciplineMaterials science
dc.subject.keywordsHYDROXYL-GROUPS
dc.subject.keywordsSURFACE
dc.subject.keywordsDENSITY
dc.subject.keywordsSIO2
dc.subject.keywordsSILICA
dc.subject.keywordsArea selective deposition
dc.subject.keywordsTi oxide
dc.subject.keywordsModeling
dc.title

A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition

dc.typeJournal article
dspace.entity.typePublication
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