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Browsing by Author "Kapteyn, Henity"

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    Publication

    A Laboratory Light Source for Ultrafast Kinetics of EUV Exposure Processes and Ultra-Small Pitch Lithography

    Cousin, Seth L.
    ;
    Bargsten, Clayton
    ;
    Rinard, Eric
    ;
    Ward, Rod
    ;
    Hosler, Erik
    ;
    Petersen, Brennan
    Proceedings paper
    2020, Conference on Lasers and Electro-Optics (CLEO), MAY 10-15, 2020

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