Browsing by Author "Karim, Zia"
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Publication AVD and MOCVD TaCN-based films for gate metal applications on high-k gate dielectrics
;Karim, Zia ;Barbar, Ghassan ;Boissiere, Olivier ;Lehnen, Peer ;Lohe, ChristophSeidel, TomProceedings paper2007-10, Physics and Technology of High-k Dielectrics, 7/10/2007, p.557-567