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Browsing by Author "Karklin, L."

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    Complementary phase-shift mask towards 70-nm technology node

    Driessen, Frank
    ;
    Vandenberghe, Geert  
    ;
    Ercken, Monique  
    ;
    Montgomery, Patrick
    ;
    Ronse, Kurt  
    Proceedings paper
    2002, Optical Microlithography XV, 5/03/2002, p.Addendum

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