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Browsing by Author "Karmarkar, Aditya P."

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    Publication

    Performance and reliability impact of copper plasticity in backside TSV-last fabrication process

    Karmarkar, Aditya P.
    ;
    Guo, Wei  
    ;
    Xu, Xiaopeng
    ;
    Van der Plas, Geert  
    ;
    Van Huylenbroeck, Stefaan  
    Journal article
    2016, IEEE Transactions on Device and Materials Reliability, (16) 3, p.402-412

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