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Browsing by Author "Kashiwagi, Yusaki"

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    Electrical improvement of CNT contacts with Cu damascene top metallization

    van der Veen, Marleen  
    ;
    Barbarin, Yohan
    ;
    Vereecke, Bart  
    ;
    Masahito, Sugiura
    ;
    Kashiwagi, Yusaki
    Proceedings paper
    2013, IEEE International Interconnect Technology Conference - IITC, 13/06/2013, p.13-Mar

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