Publication:

Electrical improvement of CNT contacts with Cu damascene top metallization

Date

2013

Proceedings Paper

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Author(s)

van der Veen, Marleen

;

Barbarin, Yohan

;

;

Masahito, Sugiura

;

Kashiwagi, Yusaki

;

;

Huyghebaert, Cedric

;

Statistics

1888 since deposited on 2021-10-21

Acq. date: 2026-09-21