Publication:

Electrical improvement of CNT contacts with Cu damascene top metallization

Date

2013
Proceedings Paper
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dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorBarbarin, Yohan
dc.contributor.authorVereecke, Bart
dc.contributor.authorMasahito, Sugiura
dc.contributor.authorKashiwagi, Yusaki
dc.contributor.authorCott, Daire
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned2021-10-21T13:20:40Z
dc.date.available2021-10-21T13:20:40Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23243
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6615601&contentType=Conference+Publications
dc.source.beginpage13-Mar
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate13/06/2013
dc.source.conferencelocationKyoto Japan
dc.title

Electrical improvement of CNT contacts with Cu damascene top metallization

dc.typeProceedings paper
dspace.entity.typePublication
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