Browsing by Author "Kasprowicz, Bryan"

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Comparisons of 9% versus 6% transmission attenuated phase-shift mask for the 65nm device mode

Montgomery, Patrick K.
;
Lucas, Kevin D.
;
Litt, Lloyd C.
;
Conley, Will
;
Fanucchi, Eric
Proceedings paper
2003-12, 23rd Annual BACUS Symposium on Photomask Technology, 8/09/2003, p.814-825
Image imbalance compensation in alternating phase-shift masks towards the 45 node through-pitch imaging

Van Look, Lieve
;
Kasprowicz, Bryan
;
Zibold, Axel
;
Degel, Wolfgang
;
Vandenberghe, Geert
Proceedings paper
2005, 25th Annual BACUS Symposium on Photomask Technology, 2/10/2005, p.59921S