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Browsing by Author "Kastner, Markus"

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    Molecular glass resists for all-dry high-resolution scanning probe lithography

    Neuber, Christian
    ;
    Cooke, Mike
    ;
    Despont, Michel
    ;
    Durig, Urs
    ;
    Kastner, Markus
    ;
    Knoll, Armin
    Oral presentation
    2013, 39th International Conference on Micro and Nano Engineering

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