Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Presentations
Molecular glass resists for all-dry high-resolution scanning probe lithography
Publication:
Molecular glass resists for all-dry high-resolution scanning probe lithography
Date
2013
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Neuber, Christian
;
Cooke, Mike
;
Despont, Michel
;
Durig, Urs
;
Kastner, Markus
;
Knoll, Armin
;
de Marneffe, Jean-Francois
;
Rangelow, Ivo
;
Rawlings, Colin
;
De Schepper, Peter
;
Schmidt, Hans-Werner
;
Strohriegl, Peter
Journal
Abstract
Description
Metrics
Views
1980
since deposited on 2021-10-21
427
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1980
since deposited on 2021-10-21
427
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations