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Browsing by Author "Kato, I."

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    Influence of hydrogen on losses in silicon oxynitride planar optical waveguides

    Sahu, B. S.
    ;
    Agnihotri, Om Prakash
    ;
    Jain, Suresh
    ;
    Mertens, Robert  
    ;
    Kato, I.
    Journal article
    2000, Semiconductor Science and Technology, (15) 3, p.L11-L14

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