Browsing by Author "Kato, M."
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Publication Carrier diffusivity in highly excited bulk SiC, GaN, and diamond crystals by optical probes
Proceedings paper2012, Silicon Carbide and Related Materials 2011, 11/09/2011, p.309-312Publication Characterization of PVD TaN and ALD WNxCy copper diffusion barriers on a porous CVD low-k material
Proceedings paper2004, Advanced Metallization Conference 2003, 21/10/2003, p.723-728