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Browsing by Author "Kawase, Yasuhiro"

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    Publication

    Improvement in post-Chemical Mechanical Planarization cleaning process for Ru interconnects

    Harada, Ken  
    ;
    Shibata, Toshiaki
    ;
    Kawase, Yasuhiro
    ;
    Teugels, Lieve  
    ;
    Heylen, Nancy  
    ;
    Struyf, Herbert  
    Oral presentation
    2019, The Surface Preparation And CLeaning Conference (SPCC)

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