Browsing by Author "Kayser, Yves"

Now showing 1 - 5 of 5

A compact vibration reduced set-up for scanning nm-XRF and STXM

Lubeck, Janin
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Seim, Christian
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Dehlinger, Aurelie
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Haidl, Andreas
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Hoenicke, Philipp
Journal article
2018, Microscopy and Microanalysis, (24) Suppl. 2, p.158-161
Development and reference-free characterization of 3D nanostructures as potential calibration sample for analytical techniques

Dialameh, Masoud
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Ferrarese Lupi, Federico
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De Leo, Natascia
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Boarino, Luca
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Hönicke, Philipp
Oral presentation
2017, E-MRS Spring Meeting Symposium on Analytical Techniques for Precise Characterization of Nano Materials - ALTECH
Development and synchrotron-based characterization of Al and Cr nanostructures as potential calibration samples for 3D analytical techniques

Dialameh, Masoud
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Ferrarese Lupi, Federico
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Hönicke, Philipp
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Kayser, Yves
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Beckhoff, Burkhard
Journal article
2018, Physica Status Solidi A, (215) 6, p.1700866
Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

Hoenicke, Philipp
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Kayser, Yves
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Nikolaev, Konstantin, V
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Soltwisch, Victor
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Scheerder, Jeroen
Journal article
2022, SMALL, (18) 6, p.2105776
Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques

Hoenicke, Philipp
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Kayser, Yves
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Soltwisch, Victor
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Waehlish, Andre
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Wauschkuhn, Nils
Proceedings paper
2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023