Browsing by Author "Kazazis, Dimitrios"
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Publication Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging
Journal article2019, Journal of Micro/Nanolithography MEMS and MOEMS, (18) 1, p.14002Publication Extreme ultraviolet induced reactions of tin-oxo cage photoresists
Journal article2026, JOURNAL OF MATERIALS CHEMISTRY C, (14) 15, p.6177-6189