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Browsing by Author "Kazazis, Dimitrios"

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    Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging

    Mochi, Iacopo
    ;
    Timmermans, Marina  
    ;
    Gallagher, Emily  
    ;
    Mariano, Marina  
    ;
    Pollentier, Ivan  
    Journal article
    2019, Journal of Micro/Nanolithography MEMS and MOEMS, (18) 1, p.14002
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    Extreme ultraviolet induced reactions of tin-oxo cage photoresists

    Sadegh, Najmeh
    ;
    Haitjema, Jarich
    ;
    Zhang, Yu  
    ;
    Wu, Lianjia  
    ;
    Lugier, Olivier
    ;
    Bespalov, Ivan
    Journal article
    2026, JOURNAL OF MATERIALS CHEMISTRY C, (14) 15, p.6177-6189

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