Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Kelleher, Deirdre Maria"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/Ta

    Tokei, Zsolt  
    ;
    Kelleher, Deirdre Maria
    ;
    Mebarki, Bencherki
    ;
    Mandrekar, T.
    ;
    Guggilla, S.
    Journal article
    2003, Microelectronic Engineering, (70) 2_4, p.358-362

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings