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Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/Ta
Publication:
Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/Ta
Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tokei, Zsolt
;
Kelleher, Deirdre Maria
;
Mebarki, Bencherki
;
Mandrekar, T.
;
Guggilla, S.
;
Maex, Karen
Journal
Microelectronic Engineering
Abstract
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1965
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1965
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations