Publication:

Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/Ta

Date

2003
Journal article
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dc.contributor.authorTokei, Zsolt
dc.contributor.authorKelleher, Deirdre Maria
dc.contributor.authorMebarki, Bencherki
dc.contributor.authorMandrekar, T.
dc.contributor.authorGuggilla, S.
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-15T06:59:39Z
dc.date.available2021-10-15T06:59:39Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8219
dc.source.beginpage358
dc.source.endpage362
dc.source.issue2_4
dc.source.journalMicroelectronic Engineering
dc.source.volume70
dc.title

Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/Ta

dc.typeJournal article
dspace.entity.typePublication
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