Browsing by Author "Kempsell Sears, Monica"
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Publication Lens wavefront compensation for 3D photomask effects in subwavelength optical lithography
Journal article2013, Applied Optics, (52) 3, p.314-322Publication Pupil wavefront manipulation for optical nanolithography
Proceedings paper2012, Optical Microlithography XXV, 12/02/2012, p.832611