Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Kempsell Sears, Monica"

Filter results by typing the first few letters
Now showing 1 - 2 of 2
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Lens wavefront compensation for 3D photomask effects in subwavelength optical lithography

    Kempsell Sears, Monica
    ;
    Bekaert, Joost  
    ;
    Smith, Bruce W.
    Journal article
    2013, Applied Optics, (52) 3, p.314-322
  • Loading...
    Thumbnail Image
    Publication

    Pupil wavefront manipulation for optical nanolithography

    Kempsell Sears, Monica
    ;
    Bekaert, Joost  
    ;
    Smith, Bruce W.
    Proceedings paper
    2012, Optical Microlithography XXV, 12/02/2012, p.832611

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings