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Browsing by Author "Keunen, K."

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    Electron spin resonance study of defects in low-k oxide insulators (k = 2.5–2.0)

    Afanasiev, Valeri  
    ;
    Keunen, K.
    ;
    Stesmans, Andre  
    ;
    Jivanescu, M.
    ;
    Tokei, Zsolt  
    ;
    Baklanov, Mikhaïl
    Journal article
    2011, Microelectronic Engineering, (88) 7, p.1503-1506

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