Browsing by Author "Keunen, K."
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Publication Electron spin resonance study of defects in low-k oxide insulators (k = 2.5–2.0)
Journal article2011, Microelectronic Engineering, (88) 7, p.1503-1506
Electron spin resonance study of defects in low-k oxide insulators (k = 2.5–2.0)