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Electron spin resonance study of defects in low-k oxide insulators (k = 2.5–2.0)
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Electron spin resonance study of defects in low-k oxide insulators (k = 2.5–2.0)
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Afanasiev, Valeri
;
Keunen, K.
;
Stesmans, Andre
;
Jivanescu, M.
;
Tokei, Zsolt
;
Baklanov, Mikhaïl
;
Beyer, Gerald
Journal
Microelectronic Engineering
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since deposited on 2021-10-19
Acq. date: 2025-12-15
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1845
since deposited on 2021-10-19
Acq. date: 2025-12-15
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Downloads
1
since deposited on 2021-10-19
Acq. date: 2025-12-15
Views
1845
since deposited on 2021-10-19
Acq. date: 2025-12-15
Citations