Publication:

Electron spin resonance study of defects in low-k oxide insulators (k = 2.5–2.0)

Date

2011
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorKeunen, K.
dc.contributor.authorStesmans, Andre
dc.contributor.authorJivanescu, M.
dc.contributor.authorTokei, Zsolt
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorBeyer, Gerald
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecAfanasiev, Valeri::0000-0001-5018-4539
dc.date.accessioned2021-10-19T12:28:29Z
dc.date.available2021-10-19T12:28:29Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18454
dc.source.beginpage1503
dc.source.endpage1506
dc.source.issue7
dc.source.journalMicroelectronic Engineering
dc.source.volume88
dc.title

Electron spin resonance study of defects in low-k oxide insulators (k = 2.5–2.0)

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
22411.pdf
Size:
297.96 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles