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Browsing by Author "Keuning, W"

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    Physical characterization of ALD Al2O3 films deposited on GaAs substrates

    Franquet, Alexis  
    ;
    Conard, Thierry  
    ;
    Vandervorst, Wilfried  
    ;
    Sioncke, Sonja
    ;
    Caymax, Matty  
    Meeting abstract
    2008, 14th International Conference on Thin Films - ICTF 14, 17/11/2008, p.46

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