Publication:

Physical characterization of ALD Al2O3 films deposited on GaAs substrates

Date

2008
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Author(s)

Franquet, Alexis  
;
Conard, Thierry  
;
Vandervorst, Wilfried  
;
Sioncke, Sonja
;
Caymax, Matty  
;
Delabie, Annelies  
;
Heyns, Marc  
;
Meuris, Marc  
;
Brammertz, Guy  
;
Van Hemmen, J.L.
;
Keuning, W
;
Kessels, W.M.M.

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Abstract

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