Browsing by Author "Keuning, W."
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Publication Atomic layer deposition of high-k dielectric layers on Ge and III-V MOS channels
Proceedings paper2008, SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices, 12/10/2008, p.671-685Publication Atomic layer deposition of high-k dielectric layers on Ge and III-V MOS channels
Meeting abstract2008, 214th ECS Meeting, 12/10/2008, p.2449