Publication:
Atomic layer deposition of high-k dielectric layers on Ge and III-V MOS channels
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1973 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-08
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Metrics
Views
1973 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-08
Citations