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Browsing by Author "Keuning, Wytze"

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    Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates

    Sioncke, Sonja
    ;
    Delabie, Annelies  
    ;
    Brammertz, Guy  
    ;
    Conard, Thierry  
    ;
    Franquet, Alexis  
    Journal article
    2009, Journal of the Electrochemical Society, (156) 4, p.H255-H262

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