Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates

Sioncke, Sonja; Delabie, Annelies; Brammertz, Guy; Conard, Thierry; Franquet, Alexis; Caymax, Matty; Urbanczyk, Adam; Heyns, Marc; Meuris, Marc; Van Hemmen, J.L.; Keuning, Wytze; Kessels, W.M.M.

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Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates

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2009

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Journal of the Electrochemical Society

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Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates

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