Browsing by Author "Khalil, N."

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Comparison of two-dimensional carrier profiles in metal-oxide-semiconductor field-effect transistor structures obtained with scanning spreading resistance microscopy and inverse modeling

De Wolf, Peter
;
Vandervorst, Wilfried
;
Smith, H.
;
Khalil, N.
Journal article
2000, J. Vacuum Science and Technology B, (B18) 1, p.540-544
Intercomparison of 2-D carrier profiles in MOSFET structures obtaind with scanning resistance microscopy and inverse modeling

De Wolf, Peter
;
Vandervorst, Wilfried
;
Smith, H.
;
Khalil, N.
Proceedings paper
1999, 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Semiconductors, 28/03/1999, p.148-154