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Browsing by Author "Khan, Muhaimin Mareum"

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    Publication

    Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

    Erofeev, Ivan
    ;
    Hartanto, Antony Winata
    ;
    Khan, Muhaimin Mareum
    ;
    Deng, Kerong
    ;
    Kumar, Krishna
    Journal article
    2025, ADVANCED MATERIALS INTERFACES, (12) 1, p.Art. 2400558

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