Browsing by Author "Khan, Muhaimin Mareum"
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Publication Digital Etching of Molybdenum Interconnects Using Plasma Oxidation
;Erofeev, Ivan ;Hartanto, Antony Winata ;Khan, Muhaimin Mareum ;Deng, KerongKumar, KrishnaJournal article2025, ADVANCED MATERIALS INTERFACES, (12) 1, p.Art. 2400558