Publication:

Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

Date

2025
Journal article
https://doi.org/10.1002/admi.202400558
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Published version 2.63 MB

Author(s)

Erofeev, Ivan
;
Hartanto, Antony Winata
;
Khan, Muhaimin Mareum
;
Deng, Kerong
;
Kumar, Krishna
;
Aabdin, Zainul
;
Tjiu, Weng Weei
;
Zhang, Mingsheng
;
Pacco, Antoine  
;
Philipsen, Harold  
;
Chowdhuri, Angshuman Ray
;
Huynh, Han Vinh
;
Holsteyns, Frank  
;
Mirsaidov, Utkur

Journal

ADVANCED MATERIALS INTERFACES

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449 since deposited on 2024-11-26
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243 since deposited on 2024-11-26
6last month
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Acq. date: 2026-04-07

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