Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

Mirsaidov, Utkur

doi:10.1002/admi.202400558

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Erofeev, Ivan

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Hartanto, Antony Winata

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Khan, Muhaimin Mareum

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Chowdhuri, Angshuman Ray

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Huynh, Han Vinh

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Holsteyns, Frank

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Mirsaidov, Utkur

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ADVANCED MATERIALS INTERFACES

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180 since deposited on 2024-11-26

Acq. date: 2025-10-23

228 since deposited on 2024-11-26

Acq. date: 2025-10-23

Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

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