Publication:

Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

Date

2025
Journal article
https://doi.org/10.1002/admi.202400558
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0001-6330-5053
cris.virtual.orcid0000-0002-5029-1104
cris.virtualsource.departmentd9077a5e-4edd-459f-acd8-da1f0d07f2c7
cris.virtualsource.department25472ea7-4829-4b6d-9541-94896891daec
cris.virtualsource.orcidd9077a5e-4edd-459f-acd8-da1f0d07f2c7
cris.virtualsource.orcid25472ea7-4829-4b6d-9541-94896891daec
dc.contributor.authorErofeev, Ivan
dc.contributor.authorHartanto, Antony Winata
dc.contributor.authorKhan, Muhaimin Mareum
dc.contributor.authorDeng, Kerong
dc.contributor.authorKumar, Krishna
dc.contributor.authorAabdin, Zainul
dc.contributor.authorTjiu, Weng Weei
dc.contributor.authorZhang, Mingsheng
dc.contributor.authorPacco, Antoine
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorChowdhuri, Angshuman Ray
dc.contributor.authorHuynh, Han Vinh
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorMirsaidov, Utkur
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecHolsteyns, Frank::0009-0002-2123-452X
dc.date.accessioned2025-05-06T09:16:24Z
dc.date.available2024-11-26T16:55:31Z
dc.date.available2025-05-06T09:16:24Z
dc.date.embargo2024-11-12
dc.date.issued2025
dc.description.wosFundingTextThis work was supported by the Singapore National Research Foundation's Competitive Research Program funding (NRF-CRP23-2019-0001).
dc.identifier.doi10.1002/admi.202400558
dc.identifier.issn2196-7350
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44846
dc.publisherWILEY
dc.source.beginpageArt. 2400558
dc.source.endpageN/A
dc.source.issue1
dc.source.journalADVANCED MATERIALS INTERFACES
dc.source.numberofpages7
dc.source.volume12
dc.title

Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
Adv Materials Inter - 2024 - Erofeev - Digital Etching of Molybdenum Interconnects Using Plasma Oxidation.pdf
Size:
2.63 MB
Format:
Adobe Portable Document Format
Description:
Published version
Download
Publication available in collections:
Articles