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Browsing by Author "Khandelwal, A."

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    Cu resistivity scaling limits for 20 nm copper damascene lines

    Van Olmen, Jan  
    ;
    List, Scott
    ;
    Tokei, Zsolt  
    ;
    Carbonell, Laure
    ;
    Brongersma, Sywert  
    ;
    Volders, Henny  
    Proceedings paper
    2007, IEEE International Interconnect Technology Conference - IITC, 4/06/2007, p.49-51

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