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Browsing by Author "Khodko, Oleksandr"

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    Predictive compact model for stress-induced on-product overlay correction

    Zhang, Huaichen
    ;
    Tabery, Cyrus
    ;
    Maas, Ruben
    ;
    Khodko, Oleksandr
    ;
    Blanco, Victor  
    ;
    Canga, Eren  
    Journal article
    2022, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (21) 4, p.Art. 043201

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